Parylene membrane based chemomechanical explosive sensor

High-quality-factor Parylene-c- Based Intraocular Pressure Sensor

Parylene-based electret power generators

An electret power generator is developed using a new electret made of a charged parylene HT R © thin-film polymer. Here, parylene HT R © is a room-temperature chemical-vapor-deposited thin-film polymer that is MEMS and CMOS compatible. With corona charge implantation, the surface charge density of parylene HT R © is measured as high as 3.69 mC m−2. Moreover, it is found that, with annealing at ...

A High-Flux, Flexible Membrane with Parylene-encapsulated Carbon Nanotubes

We present fabrication and characterization of a membrane based on carbon nanotubes (CNTs) and parylene. Carbon nanotubes have shown orders of magnitude enhancement in gas and water permeability compared to estimates generated by conventional theories [1, 2]. Large area membranes that exhibit flux enhancement characteristics of carbon nanotubes may provide an economical solution to a variety of...

Parylene MEMS patency sensor for assessment of hydrocephalus shunt obstruction.

Neurosurgical ventricular shunts inserted to treat hydrocephalus experience a cumulative failure rate of 80 % over 12 years; obstruction is responsible for most failures with a majority occurring at the proximal catheter. Current diagnosis of shunt malfunction is imprecise and involves neuroimaging studies and shunt tapping, an invasive measurement of intracranial pressure and shunt patency. Th...

A Flexible Parylene Neural Probe Combined with a Microdialysis Membrane

We designed a flexible probe to record both neuroelectrical and neurochemical activities (Figure 1). This probe has four microelectrodes for neural recording and a fluidic channel covered with a semipermeable membrane; the membrane is used for microdialysis in the brain. We measured impedance of the electrodes, and examined the leakage of dialysate from the fluidic channel in vitro.